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Gas Concentration Analyzer for Hydrogen Fluoride (HF) and Ammonia (NH3)

AMC Monitoring for Inorganic Gases

The Picarro SI2306 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen fluoride (HF) and ammonia (NH3) in a reliable, easy-to-use, compact design. The SI2306 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.

  • Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
  • Fast, continuous analysis in seconds
  • Virtually no downtime or consumables cost
  • Free of interference from common fab chemicals
  • Extreme accuracy for event confirmation
  • No field calibration required
Gas DetectedHydrogen Flouride (HF)Ammonia (NH3)
Precision (1σ)≤30 ppt (10 sec),
≤10 ppt (100 sec)
≤300 ppt (10 sec),
≤100 ppt (100 sec)
Lower Detectable Limit (3σ)30 ppt300 ppt
Method Detection Limit
(per Semi C10-1109)
500 ppt500 ppt
Linearity
(per IEC 61207)
±1%±1%
Accuracy at span±5% @ full scale±5% @ full scale
Accuracy at zero±25 ppt±100 ppt
Instrument-to-Instrument Consistency±5% @ full scale
±25 ppt @ zero
±5% @ full scale
±100 ppt @ zero
Measurement Range0-1 ppm0-10 ppm
Measurement Interval*<4 seconds
Sample Flow Rate~2 slpm
Combined Response Times
(T90/10 + T10/90) @ 20 ppb
<3 minutes
Fall Times
T90/10 @ 20 ppb
<1 minute

*-Measurement interval at span may increase as much as 2x above listed values.

Measurement TechniqueCavity Ring-Down Spectroscopy
Calibration Period RecommendationCalibration not required - Initial validation at 6 months, then every 12 months thereafter
Time Required to Perform ValidationEstimated at <15 minutes per manufacturer's instructions
Measurement Cell Temperature Control±0.005°C
Measurement Cell Pressure Control±0.0002 atm
Operating Temperature15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity<99% RH non-condensing
AccessoriesPump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)
Communication InterfacesRS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA (optional)
Sample Inlet Connection1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
DimensionsAnalyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm)
Weight73 lbs. (33.18 kg) including external pump
Power Requirements100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty12 months
CertificationsCE conformance
Country of ManufactureUSA
Components/PartsActionsFrequency
Particulate filterReplaceEvery 6 months
Measurement Validation Proxy validation Every 12 months
PumpRebuild (diaphragm)Preventive maintenance every 2 years
Fan assemblies  ReplacePreventive maintenance every 2 years
External Pump ReplaceEvery 5 years