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Gas Concentration Analyzer for NH3, HCI, HF

AMC Monitoring for Inorganic Gases

The SI3401 AMC Gas Concentration Analyzer delivers real-time measurements of ammonia (NH3), hydrochloric acid (HCI), and hydrofluoric acid (HF). Designed for use in fabs, the SI3401 analyzer enables operators to quickly identify and address contamination events that can affect wafer yield.

Utilizing Picarro’s highly selective, sensitive, and accurate Cavity Ringdown Spectroscopy (CRDS), the SI3401 analyzer features:

  • Parts-per-trillion (ppt) sensitivity
  • No field calibration required, just annual verification with proxy gas mix of CH4, CO2 and O­2 
  • Fast, continuous measurements in seconds
  • Minimal maintenance with no consumables
Gas DetectedHClHFNH3H2O
Precision≤75 ppt (10 sec),
≤25 ppt (100 sec)
≤40 ppt (10 sec),
≤13 ppt (100 sec)
≤300 ppt (10 sec),
≤100 ppt (100 sec)
≤20 ppt + (8 x %H2O)(10 sec),
≤10 ppt + (4 x %H2O)(100 sec)
Lower Detectable Limit
(100s, 3σ)
75 ppt40 ppt300 ppt30 ppt
Method Detection Limit
per Semi C10-1109)
250 ppt500 ppt500 ppt40 ppt
Linearity±1%±1%±1%±1%
Accuracy @ span±5% @ full scale±5% @ full scale±5% @ full scale±5% @ full scale
Accuracy @ zero±50 ppt±25 ppt±150 ppt±40 ppm
Instrument-to-Instrument Consistency±5% @ full scale
±50 ppt% @ zero
±5% @ full scale
±25 ppt% @ zero
±5% @ full scale
±150 ppt% @ zero
±5% @ full scale
±40 ppt% @ zero
Measurement Range0-2 ppm0-1 ppm0-10 ppm0-40000 ppm
Measurement Interval< 9s<5s<9s
Sample Flow Rate~2 slpm
Combined Response Times
(T90/10 + T10/90) @ 20 ppb
<3 min<20 sec (10,000 ppm challenge)
Fall Times
(T90/10 @ 20 ppb)
<1 min<10 sec (10,000 ppm challenge)
Measurement TechniqueCavity Ring-Down Spectroscopy
Operating Temperature15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity<99% RH non-condensing
AccessoriesPump (external, included), keyboard (included), mouse (included), LCD monitor (optional)
OutputsRS-232, Ethernet, USB
Sample Inlet Connection1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
DimensionsAnalyzer: 16.7" w × 8.4" h x 24.8" d (43 × 21.3 × 63 cm)
Weight70 lbs. (31.75 kg) including pump
Power Requirements100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty12 months
CertificationsCE conformance
Country of ManufactureUSA
Components/PartsActionsFrequency
Particulate filterReplaceEvery 6 months
Measurement Validation Proxy validation Every 12 months
PumpRebuild (diaphragm)Preventive maintenance every 2 years
Fan assemblies  ReplacePreventive maintenance every 2 years
External Pump ReplaceEvery 5 years