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SLiM 100

1-ppb Class Chemical Metrology System for Lithography Process Tool Monitoring

Volatile organic compounds (VOCs) and inorganic compounds within the lithography process cause defects on reticles, hazing of scanner optics, and other serious problems that damage expensive lithography tools and can result in yield loss. The Picarro SLiM 100 Lithography Monitoring System is a 1-ppb class detection system that integrates Picarro’s industry leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system specifically for monitoring VOCs in the fab. The SLiM 100 system is a real-time measurement system that is designed to run 24/7 in the fab environment. It is a fully integrated chemical metrology system that is robust, easy-to-operate, and is ideal for use as a high-volume process monitoring and control system. The Picarro SLiM 100 has the capability to measure 10 organic compounds that negatively affect the lithography process with concentration sensitivity down to 1 part-per-billion. The system can also accommodate analyzers that measure inorganic molecules at parts-per-trillion concentration levels.

Gas DetectedVOC: Acetic Acid, Acetone, D3 Siloxane, HMDSO, IPA, PGME, TMS, D6 Siloxane, NMP, PGMEA
Inorganic (Optional): NH3, HF, HCl, SO2, H2S (Depending on choice of analyzers from table below)
Sampling Line1/2" OD x 3/8" ID UHP-PFA tubing
Number of Ports24 or 32
Dimensions

Keyboard Tray Closed

  • 79" (H) × 34" (W) x 38" (D)
  • 2012 mm (H) × 864 mm (W) × 971 mm (D)

Keyboard Tray Open

  • 79" (H) × 34" (W) × 46" (D)
  • 2012 mm (H) x 864 mm (W) × 1172 mm (D)
Weight (without Analyzers)
  • 24 Port: 447 lbs (203 kg)
  • 32 Port: 482 Ibs (218 kg)
  • Add 75 lbs (34 kg) for each analyzer
Power Requirements220-240 VAC single phase, 50/60 Hz, 20 Amp
CommunicationEthernet TCP/IP, RESTful API
Warranty12 months
CertificationsCE, SEMI S2
Country of ManufactureUSA
AnalyzersGases Measured
VOC AnalyzerVOC-10*
SI3401NH3, HF, HCl
SI2205HF
SI2108HCl
SI2104H2S
SI2306HF, NH3
SI2103NH3
SI5450SO2

 

*-VOC (Acetic Acid, Acetone, D3 Siloxane, HMDSO, IPA, PGME, TMS, D6 Siloxane, NMP, PGMEA)
 

Part Numbers (Other Combinations Available) 
SL100-24-EK0024 port AMC system for NH3, HF, VOC
SL100-32-K00032 port AMC system for VOC
SL100-32-AK0032 port stationary AMC system for NH3, HF, HCl, VOC
Components/PartsActionsFrequency
Zero filterReplaceEvery 6 months
Particulate filter - AnalyzerReplaceEvery 6 months
Pump - Analyzer  Preventative Maintenance
Rebuild (Diaphragm)
Every 2 years
Fan assemblies - Analyzer  Preventative MaintenanceEvery 2 years
External pump - Analyzer   ReplaceEvery 5 years