Skip to main content

Gas Concentration Analyzer for Sulfur Dioxide (SO2)

AMC Monitoring for Inorganic Gases

The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO2 gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.

  • Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
  • Fast, continuous analysis in seconds
  • Virtually no downtime or consumables cost
  • Free of interference from common fab chemicals
  • Extreme accuracy for event confirmation
Gas DetectedSulfur Dioxide (SO2)
Precision (1σ)≤360 ppt (10 sec),
≤120 ppt (100 sec),
≤70 ppt (300 sec)
Lower Detectable Limit (3σ)350 ppt (100 sec),
200 ppt (300 sec),
140 ppt (600 sec)
Linearity
(per IEC 61207)
±1%
Accuracy at span±5% @ full scale
Accuracy at zero±300 ppt
Instrument-to-Instrument Consistency±5% @ full scale
±300 ppt @ zero
Measurement Range0-1000 ppb
Measurement Interval*< 5 seconds
Sample Flow Rate~0.2 slm
Combined Response Times
(T90/10 + T10/90) @ 20 ppb (Humid)
<30 seconds
Fall Times
T90/10 @ 20 ppb (Humid)
<15 seconds
Measurement TechniqueCavity Ring-Down Spectroscopy
Calibration Period RecommendationCalibration not required - Initial validation at 6 months, then every 12 months thereafter
Time Required to Perform ValidationEstimated at <15 minutes per manufacturer's instructions
Measurement Cell Temperature Control±0.005°C
Measurement Cell Pressure Control±0.0002 atm
Operating Temperature15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity<99% RH non-condensing
AccessoriesPump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)
Communication InterfacesRS-232, Ethernet, USB, Modbus, 4-20mA (optional)
Sample Inlet Connection1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
DimensionsAnalyzer: 16.63" w x 8.75" h x 30.25" d (42.24 x 22.22 x 76.84 cm)
Weight75 lbs. (34 kg) including external pump
Power Requirements100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty12 months
CertificationsCE conformance
Country of ManufactureUSA
Components/PartsActionsFrequency
Particulate filterReplaceEvery 6 months
Measurement Validation Proxy validation Every 12 months
PumpRebuild (diaphragm)Preventive maintenance every 2 years
Fan assemblies  ReplacePreventive maintenance every 2 years
External Pump ReplaceEvery 5 years