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The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO2 gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.
- Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
- Fast, continuous analysis in seconds
- Virtually no downtime or consumables cost
- Free of interference from common fab chemicals
- Extreme accuracy for event confirmation
| Gas Detected | Sulfur Dioxide (SO2) |
|---|---|
| Precision (1σ) | ≤360 ppt (10 sec), ≤120 ppt (100 sec), ≤70 ppt (300 sec) |
| Lower Detectable Limit (3σ) | 350 ppt (100 sec), 200 ppt (300 sec), 140 ppt (600 sec) |
| Linearity (per IEC 61207) | ±1% |
| Accuracy at span | ±5% @ full scale |
| Accuracy at zero | ±300 ppt |
| Instrument-to-Instrument Consistency | ±5% @ full scale ±300 ppt @ zero |
| Measurement Range | 0-1000 ppb |
| Measurement Interval* | < 5 seconds |
| Sample Flow Rate | ~0.2 slm |
| Combined Response Times (T90/10 + T10/90) @ 20 ppb (Humid) | <30 seconds |
| Fall Times T90/10 @ 20 ppb (Humid) | <15 seconds |
| Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
| Calibration Period Recommendation | Calibration not required - Initial validation at 6 months, then every 12 months thereafter |
| Time Required to Perform Validation | Estimated at <15 minutes per manufacturer's instructions |
| Measurement Cell Temperature Control | ±0.005°C |
| Measurement Cell Pressure Control | ±0.0002 atm |
| Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
| Ambient Humidity | <99% RH non-condensing |
| Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional) |
| Communication Interfaces | RS-232, Ethernet, USB, Modbus, 4-20mA (optional) |
| Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
| Dimensions | Analyzer: 16.63" w x 8.75" h x 30.25" d (42.24 x 22.22 x 76.84 cm) |
| Weight | 75 lbs. (34 kg) including external pump |
| Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
| Warranty | 12 months |
| Certifications | CE conformance |
| Country of Manufacture | USA |
| Components/Parts | Actions | Frequency |
|---|---|---|
| Particulate filter | Replace | Every 6 months |
| Measurement Validation | Proxy validation | Every 12 months |
| Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
| Fan assemblies | Replace | Preventive maintenance every 2 years |
| External Pump | Replace | Every 5 years |