NH3 (SI2103)

The Picarro SI2103 gas concentration analyzer delivers ultraprecise, parts-per-trillion (ppt) measurements of ammonia (NH₃) in a reliable, easy-to-use, compact design. The SI2013 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.

Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
Fast, continuous analysis in seconds
Virtually no downtime or consumables cost
Free of interference from common fab chemicals
Extreme accuracy for event confirmation
No field calibration required

Status

Active

Gas Detected	Ammonia (NH₃)
Precision (1σ)	≤300 ppt (10 sec), ≤100 ppt (100 sec)
Lower Detectable Limit (3σ)	300 ppt
Method Detection Limit (per Semi C10-1109)	500 ppt
Linearity (per IEC 61207)	±1%
Accuracy at span	±5% @ full scale
Accuracy at zero	±100 ppt
Instrument-to-Instrument Consistency	±5% @ full scale ±100 ppt @ zero
Measurement Range	0-10 ppb
Measurement Interval^*	<4 seconds
Sample Flow Rate	~2 slm
Combined Response Times (T90/10 + T10/90) @ 20 ppb	<3 minutes
Fall Times T90/10 @ 20 ppb	<1 minute

^*-Measurement interval at span may increase as much as 2x above listed values.

Measurement Technique	Cavity Ring-Down Spectroscopy
Calibration Period Recommendation	Calibration not required - Initial validation at 6 months, then every 12 months thereafter
Time Required to Perform Validation	Estimated at <15 minutes per manufacturer's instructions
Measurement Cell Temperature Control	±0.005°C
Measurement Cell Pressure Control	±0.0002 atm
Operating Temperature	15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity	<99% RH non-condensing
Accessories	Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)
Communication Interfaces	RS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA (optional)
Sample Inlet Connection	1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
Dimensions	Analyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm)
Weight	73 lbs. (33.18 kg) including external pump
Power Requirements	100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty	12 months
Certifications	CE conformance
Country of Manufacture	USA

Components/Parts	Actions	Frequency
Particulate filter	Replace	Every 6 months
Measurement Validation	Proxy validation	Every 12 months
Pump	Rebuild (diaphragm)	Preventive maintenance every 2 years
Fan assemblies	Replace	Preventive maintenance every 2 years
External Pump	Replace	Every 5 years

Related Products