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The Picarro SI2205 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen fluoride (HF) in a reliable, easy-to-use, compact design. The SI2205 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.

  • Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
  • Fast, continuous analysis in seconds
  • Virtually no downtime or consumables cost
  • Free of interference from common fab chemicals
  • Extreme accuracy for event confirmation
  • No field calibration required

Gas Detected

Hydrogen Fluoride (HF)

Precision (1σ)

≤30 ppt (10 sec),
≤10 ppt (100 sec)

Lower Detectable Limit (3σ)

30 ppt

Method Detection Limit
(per Semi C10-1109)

500 ppt

(per IEC 61207)


Accuracy at span

±5% @ full scale

Accuracy at zero

±25 ppt

Instrument-to-Instrument Consistency

±5% @ full scale
±25 ppt @ zero

Measurement Range

0-1 ppm

Measurement Interval*

< 4s

Sample Flow Rate

~2 slpm

Combined Response Times
(T90/10 + T10/90) @ 20 ppb

<3 min

Fall Times
T90/10 @ 20 ppb

<1 min

*-Measurement interval at span may increase as much as 2x above listed values.

Measurement Technique

Cavity Ring-Down Spectroscopy

Calibration Period Recommendation

Calibration not required - Initial validation at 6 months, then every 12 months thereafter

Time Required to Perform Validation

Estimated at <15 minutes per manufacturer's instructions

Measurement Cell Temperature Control


Measurement Cell Pressure Control

±0.0002 atm

Operating Temperature

15 to 35°C (operating); -10 to 50°C (storage)

Ambient Humidity

<99% RH non-condensing


Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)

Communication Interfaces

RS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA(optional)

Sample Inlet Connection

1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)


Analyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm)


73 lbs. (33.18 kg) including external pump

Power Requirements

100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state


12 months


CE conformance

Country of Manufacture





Particulate filter


Every 6 months

Measurement Validation 

Proxy validation 

Every 12 months


Rebuild (diaphragm)

Preventive maintenance every 2 years

Fan assemblies  


Preventive maintenance every 2 years

External Pump 


Every 5 years