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The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO2 gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.
- Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
- Fast, continuous analysis in seconds
- Virtually no downtime or consumables cost
- Free of interference from common fab chemicals
- Extreme accuracy for event confirmation
Gas Detected | Sulfur Dioxide (SO2) |
|---|---|
Precision (1σ) | ≤360 ppt (10 sec), |
Lower Detectable Limit (3σ) | 350 ppt (100 sec), |
Linearity | ±1% |
Accuracy at span | ±5% @ full scale |
Accuracy at zero | ±300 ppt |
Instrument-to-Instrument Consistency | ±5% @ full scale |
Measurement Range | 0-1000 ppb |
Measurement Interval* | < 5 seconds |
Sample Flow Rate | ~0.2 slm |
Combined Response Times | <30 seconds |
Fall Times | <15 seconds |
Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
Calibration Period Recommendation | Calibration not required - Initial validation at 6 months, then every 12 months thereafter |
Time Required to Perform Validation | Estimated at <15 minutes per manufacturer's instructions |
Measurement Cell Temperature Control | ±0.005°C |
Measurement Cell Pressure Control | ±0.0002 atm |
Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
Ambient Humidity | <99% RH non-condensing |
Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional) |
Communication Interfaces | RS-232, Ethernet, USB, Modbus, 4-20mA (optional) |
Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
Dimensions | Analyzer: 16.63" w x 8.75" h x 30.25" d (42.24 x 22.22 x 76.84 cm) |
Weight | 75 lbs. (34 kg) including external pump |
Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
Warranty | 12 months |
Certifications | CE conformance |
Country of Manufacture | USA |
Components/Parts | Actions | Frequency |
|---|---|---|
Particulate filter | Replace | Every 6 months |
Measurement Validation | Proxy validation | Every 12 months |
Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
Fan assemblies | Replace | Preventive maintenance every 2 years |
External Pump | Replace | Every 5 years |