The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO₂ gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.

• Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
• Fast, continuous analysis in seconds
• Virtually no downtime or consumables cost
• Free of interference from common fab chemicals
• Extreme accuracy for event confirmation