The SI3401 AMC Gas Concentration Analyzer delivers real-time measurements of ammonia (NH₃), hydrochloric acid (HCI), and hydrofluoric acid (HF). Designed for use in fabs, the SI3401 analyzer enables operators to quickly identify and address contamination events that can affect wafer yield.

Utilizing Picarro’s highly selective, sensitive, and accurate Cavity Ringdown Spectroscopy (CRDS), the SI3401 analyzer features:

• Parts-per-trillion (ppt) sensitivity
• No field calibration required, just annual verification with proxy gas mix of CH₄, CO₂ and O­₂ 
• Fast, continuous measurements in seconds
• Minimal maintenance with no consumables