Gas Concentration Analyzer for Hydrogen Fluoride (HF) and Ammonia (NH3)
Gas Concentration Analyzer for Hydrogen Fluoride (HF) and Ammonia (NH3)
The Picarro SI2306 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen fluoride (HF) and ammonia (NH3) in a reliable, easy-to-use, compact design. The SI2306 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
- Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
- Fast, continuous analysis in seconds
- Virtually no downtime or consumables cost
- Free of interference from common fab chemicals
- Extreme accuracy for event confirmation
- No field calibration required