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The SI3401 AMC Gas Concentration Analyzer delivers real-time measurements of ammonia (NH3), hydrochloric acid (HCI), and hydrofluoric acid (HF). Designed for use in fabs, the SI3401 analyzer enables operators to quickly identify and address contamination events that can affect wafer yield.
Utilizing Picarro’s highly selective, sensitive, and accurate Cavity Ringdown Spectroscopy (CRDS), the SI3401 analyzer features:
- Parts-per-trillion (ppt) sensitivity
- No field calibration required, just annual verification with proxy gas mix of CH4, CO2 and O2
- Fast, continuous measurements in seconds
- Minimal maintenance with no consumables
Gas Detected | HCl | HF | NH3 | H2O |
|---|---|---|---|---|
Precision | ≤75 ppt (10 sec), | ≤40 ppt (10 sec), | ≤300 ppt (10 sec), | ≤20 ppt + (8 x %H2O)(10 sec), |
Lower Detectable Limit | 75 ppt | 40 ppt | 300 ppt | 30 ppt |
Method Detection Limit | 250 ppt | 500 ppt | 500 ppt | 40 ppt |
Linearity | ±1% | ±1% | ±1% | ±1% |
Accuracy @ span | ±5% @ full scale | ±5% @ full scale | ±5% @ full scale | ±5% @ full scale |
Accuracy @ zero | ±50 ppt | ±25 ppt | ±150 ppt | ±40 ppm |
Instrument-to-Instrument Consistency | ±5% @ full scale | ±5% @ full scale | ±5% @ full scale | ±5% @ full scale |
Measurement Range | 0-2 ppm | 0-1 ppm | 0-10 ppm | 0-40000 ppm |
Measurement Interval | < 9s | <5s | <9s | |
Sample Flow Rate | ~2 slpm | |||
Combined Response Times | <3 min | <20 sec (10,000 ppm challenge) | ||
Fall Times | <1 min | <10 sec (10,000 ppm challenge) | ||
Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
Ambient Humidity | <99% RH non-condensing |
Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional) |
Outputs | RS-232, Ethernet, USB |
Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
Dimensions | Analyzer: 16.7" w × 8.4" h x 24.8" d (43 × 21.3 × 63 cm) |
Weight | 70 lbs. (31.75 kg) including pump |
Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
Warranty | 12 months |
Certifications | CE conformance |
Country of Manufacture | USA |
Components/Parts | Actions | Frequency |
|---|---|---|
Particulate filter | Replace | Every 6 months |
Measurement Validation | Proxy validation | Every 12 months |
Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
Fan assemblies | Replace | Preventive maintenance every 2 years |
External Pump | Replace | Every 5 years |