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Press Release

Sunnyvale, CA -- Picarro, Inc. has introduced the world's most sensitive real-time gas analyzer for trace HF detection, capable of measuring down to 10 parts per trillion (lower detection limit) in ambient air. In addition to its unprecedented sensitivity, the new analyzer operates with no requirement for frequent calibration and with complete immunity to cross-talk from any other ambient gas component, including varying moisture levels. Moreover, this simple to use analyzer can be operated remotely with sampling rates as fast 1 Hz, producing drift-free data with up to four digits of precision. Plus, the high dynamic range of this rugged analyzer means it can deliver a linear response for HF concentrations as high as parts per million, with an absolute accuracy of better than 1%.

This new HF analyzer is based on Picarro's unique Wavelength-Scanned Cavity Ring Down Spectroscopy technology (WS-CRDS). This innovative technique measures near infrared absorption in a flow cell using an internal laser beam over an effective path length of up to 21 kilometers. And because only WS-CRDS scans and fits the entire absorption line profile, the HF concentration can be measured very precisely, even if there are other gas species present with absorption lines overlapping the HF line. No other real-time technique can deliver the sensitivity and precision of WS-CRDS. And other optical techniques, such as NDIR and single-wavelength CRDS, are also susceptible to signal cross-talk from other trace-gas species.

The new Picarro HF analyzer is ideal for use in semiconductor fabrication facilities and cleanroom applications where ambient air must be rigorously monitored for HF. It will also find applications in other industries where HF may be present, such as aluminum smelting and glass/glassware production. "Hydrogen fluoride is an exceptionally dangerous gas and is notoriously difficult to measure reliably" said Michael Woelk, President and CEO of Picarro. "Our HF analyzer is another terrific example of the power of our technology to provide simple turn-key solutions."

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