Picarro exhibits at Virtual SEMICON West with NEW high-throughput multi-port sampling system for continuous monitoring of AMC in cleanrooms.
Santa Clara, CA — July 13, 2020 — Picarro Inc., the industry-leading provider of trace gas analyzers for a variety of air monitoring applications, will be exhibiting at the 2020 Virtual SEMICON West trade show online, from July 20-23.
Picarro invites you to visit its virtual booth to learn how Picarro instruments can improve your yield with early warning of contamination events.
The Picarro SAM-S AMC Monitoring System integrates Picarro’s world-renowned cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system for both fixed and mobile applications. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplers relegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether. The superior design of the SAM-S system is optimized to ensure the highest combined performance, utilizing a patent-pending non-linear multiplexing system that enables high gas flow rates, minimizes cross port contamination, and quickly reports accurate AMC concentrations. The Picarro system can be configured to sample up to 16 different locations and pairs with Picarro’s SI3401 gas analyzer to measure ammonia (NH3), hydrogen fluoride (HF), and hydrogen chloride (HCl) at parts per trillion levels.
The Picarro SI Series analyzers offer the power of extreme sensitivity and accuracy for AMC, FOUP and fab equipment monitoring in a highly reliable, simple and compact design. These analyzers combine best-in-class performance, SEMI standards compliance, easy installation and very low cost of annual maintenance compared to any other AMC monitoring technique.
- Inline AMC monitoring system
- Measures NH3, HF and HCl at ppt levels
- Mobile and stationary applications
- Response time within seconds
- Minimal setup time
- Monitor multiple locations within a cleanroom
- 8 or 16 port sampling system
- Onboard industrial computer with built-in keyboard
- Secure software and communications
- Programmed cleaning cycle
- Scheduled port purging to minimize cross port contamination
- Long term accuracy
- No field calibration
- Fast recovery from pressure spikes (20s)
- Automatic bypass control
- Minimal maintenance
- Low cost of ownership
Picarro provides industry leading solutions for real-time AMC monitoring. Their cavity ring-down spectroscopy (CRDS) technology offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Picarro’s SI Series analyzers enable fast response to contaminants in the cleanroom in seconds, not hours. With real-time continuous parts-per-trillion (ppt) level analysis, Picarro analyzers provide early warning of contamination events for AMC monitoring in cleanrooms, FOUP, and fab equipment.
For additional information, please visit semi.picarro.com.
Director of Marketing Communications