Press Releases

Picarro to Co-exhibit at SEMICON Korea 2019

Picarro and KumKang Quartz Co. exhibits at SEMICON Korea with NEW Sample Sequencing Systems for continuous process monitoring of AMC

Santa Clara, CA — January 17, 2019 — Picarro Inc., a leading provider of trace gas analyzers for a variety of air monitoring applications, along with Korean distributor ACE Corporation, will be co-exhibiting with partners KumKang Quartz Co. at the 2019 SEMICON Korea trade show in COEX, Seoul, from January 23 - 25.

Picarro invites you to visit booth #C318 to learn how Picarro instruments can improve your yield with early warning of contamination events.

The Picarro SI2000 Series analyzers offer the power of extreme sensitivity and accuracy for AMC, FOUP and fab equipment monitoring in a highly reliable, simple and compact design. These analyzers combine best-in-class performance, SEMI and IEC standards compliance, easy installation and very low cost of annual maintenance compared to any other AMC monitoring technique.

Key features:

  • Real-time monitoring of inorganic gases HF, HCl, NH3 and H2S in cleanrooms, FOUP and Fab Equipment
  • Fast, continuous analysis in seconds
  • Virtually no downtime or consumables cost
  • No field calibration required

The Picarro AMC Process Monitoring and Leak Detection System continuously monitors real-time AMC event or fast leak detection of contamination event confirmation. The System has been designed to optimize response time in the presence of reactive gases with the lowest memory retention in the valves, connectors, sample lines and sequencer components. The Sample Sequencer Module utilizes a SilcoNert-coated mass flow controller and a fast flow, high volume vacuum pump to draw from long sample lines.

Key features:

  • Simultaneous, continuous flush sequencer module provides very fast sample point scanning cycles
  • Fully user-programmable leak search mode
  • Configurable for 8, 16, 24 or 32 sample ports
  • Recovery from PPM level leak events to normal cleanroom levels in just minutes

 

About Picarro

Picarro provides industry leading solutions for real-time AMC monitoring. Their cavity ring-down spectroscopy (CRDS) technology offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Picarro’s SI2000 Series analyzers enable fast response to contaminants in the cleanroom in seconds, not hours. With real-time continuous parts-per-trillion (ppt) level analysis, Picarro analyzers provide early warning of contamination events for AMC monitoring in cleanrooms, FOUP, and fab equipment.

For additional information, please visit semi.picarro.com or find us on Facebook @Picarro.Official.

 

Contact

Alan Chan
Sales Support Manager
Picarro, Inc.
[email protected]