Semiconductor Gas Purity

CRDS Monitoring of Semiconductor Gas Purity

Manufacturers of integrated circuits (both logic and memory), LEDs, and laser diodes are all driving to produce higher performance products with fewer defects. In turn this tightens the requirements on acceptable levels of trace impurities such as ammonia, hydrogen fluoride and hydrogen sulfide in feedstock gases. In many cases, gas suppliers are being asked to provide gas certifications with ppbv absolute accuracy. Similarly, there is a corresponding need for users of these gases to statistically validate their purity.

Picarro CRDS analyzers are used in both these applications because they can provide ppbv data for just one or simultaneously for all of the target gases. Other advantages of the analyzers for these applications include no requirement for sample prep or frequent calibration. In addition, these rugged portable analyzers further reduce effective testing costs by providing real-time data in seconds with no need for extensive operator training.