Picarro WS-CRDS Analyzers for Ammonia (NH3)

  • Simultaneous, precise measurement of NH3 and H2O
  • PPB sensitivity, precision & accuracy with virtually no drift
  • Fast, continuous, real time measurements without interference
  • Large dynamic range with high linearity
  • Field and laboratory deployable with no consumables
  • Installed and operational in minutes
  • Rugged and insensitive to changes in ambient temperature

WS-CRDS Analyzer for NH3 in Ambient Air - Model G1103

There are an increasing number of air-quality regulations in several countries regarding the presence of trace levels of ammonia in ambient air. These include new standards for air at agricultural facilities, a major source of atmospheric ammonia. This has created a critical need for a field-deployable ammonia sensor that is immune to changes in temperature, pressure and humidity and that does not need frequent calibration or any other type of regular operator intervention. The Picarro G1103 is the only ammonia sensor that meets all these needs in a portable rugged package capable of parts-per-billion sensitivity. It also offers a huge dynamic range, providing linear response well into the ppmv range. No dilution, concentration or other sample prep is required. Therefore, the G1103 can be operated as a remote, unattended monitoring station or used equally well as a laboratory reference instrument.

WS-CRDS Analyzer for NH3 in Semiconductor Fabs - Model G1103-t

  • Simultaneous, precise measurement of NH3 and H2O
  • PPB sensitivity, precision & accuracy with virtually no drift
  • Fast, continuous, real time measurements without interference
  • Large dynamic range with high linearity
  • Field and laboratory deployable with no consumables
  • Installed and operational in minutes
  • Rugged and insensitive to changes in ambient temperature

The Picarro G1103-t NH3 analyzer is the most sensitive NH3 analyzer we produce, and the most sensitive NH3 hands-free monitor available anywhere. It is optimized specifically for use in semiconductor fab applications.

In a semiconductor fab, ammonia (NH3) is emitted by various semiconductor processes including CVD, wafer cleaning, coater tracks, and CMP, as well as from human operators and also from outdoor air. But even low levels of NH3 can alter chemically amplified resists and can cause the chip yield to plummet. Ammonia is also photoreactive and can deposit on optical surfaces of lithography systems, causing haze and leading to unpredictable downtime. The high sensitivity and high-speed (seconds) operation of the G1103-t makes it the perfect analyzer to monitor fab air, to assess the performance of dedicated ammonia scrubbers, and for use by manufacturers of these scrubbers/filters. The analyzer's performance is unaffected by changes in humidity, pressure or other trace gases.

The G1103-t is a rugged portable unit that can operate as an unattended monitor, providing continuous data through its Ethernet port. The high performance of the G1103-t also makes it an ideal tool for R&D and reference lab applications.

WS-CRDS Analyzer for NH3 and CO2 in Exhaust Streams - Model G1103-e

  • Simultaneous, precise measurement of NH3, CO2 and H2O
  • PPB sensitivity, precision & accuracy with virtually no drift
  • Fast, continuous, real time measurements without interference
  • Large dynamic range with high linearity
  • Field and laboratory deployable with no consumables
  • Installed and operational in minutes
  • Rugged and insensitive to changes in ambient temperature

Selective Catalytic Reduction (SCR) is a method used to remove NOx from the exhaust of internal combustion engines by catalytic reaction with urea or ammonia. SCR is now field-proven in larger stationary applications. Successful optimization and deployment of SCR in automotive applications requires matching the flow rate of reductant to the widely varying speed and load of the engine. The G1103-e NH3 analyzer has been specifically optimized for these combustion R&D applications in terms of sensitivity, operating range. It is ideal for analyzing both raw and diluted exhaust streams. It retains long-term calibration, eliminating the cost and complexity of zero and span gases. In addition, the G1103-e provides simultaneous measurement of two other exhaust species, H2O and CO2, and the NH3 measurements are completely unaffected by even significant changes in these other gases. Just as important, the G1103-e is a compact rugged, self-contained instrument that requires no special training to operate and is immune to changes in ambient temperature, pressure and humidity.

WS-CRDS Analyzer for NH3 in Stacks and Flues - Model G1103-st

  • Simultaneous, precise measurement of NH3, CO2 and H2O
  • PPB sensitivity, precision & accuracy with virtually no drift
  • Fast, continuous, real time measurements without interference
  • Large dynamic range with high linearity
  • Field and laboratory deployable with no consumables
  • Installed and operational in minutes
  • Rugged and insensitive to changes in ambient temperature

In many industrial combustion plants, there is an increasing recognition of the importance of monitoring and controlling the level of ammonia in the exhaust flues and stacks. A primary drive for this is the involvement of ammonia as a reductant or unwanted by-product in DeNOx processes such as Selective Catalytic Reduction (SCR). In addition to it being a toxic pollutant in itself, residual ammonia in stack gases can react with sulfur dioxide to deposit ammonium salts in sample lines or analyzers, causing damage and requiring frequent maintenance. The G1103-st NH3 in Exhaust analyzer meets the needs of both users and manufacturers of DeNOx components and systems such as SCR traps, ammonia scrubbers and exhaust blenders. Specifically, it combines high sensitivity with a wide dynamic range, enabling it to be used on both raw and diluted stack emissions.

The G1103-st is particularly useful in industrial installations because if can be remotely operated with months of maintenance-free calibrated data. Also, because is based on WS-CRDS, the NH3 signal is not affected by wide variations in other exhaust gases such as CO2, CO and H2O. (It actually provides simultaneous CO2 and H2O concentration data). The G1103-st is also immune to crosstalk from sulfur compounds that can corrupt the data from instruments based on UV spectroscopy.

Related Documentation

Typical noise zero drift of the G1103-t analyzer over 72 hours. Changes of 0.1 ppbv would be clearly visible on this baseline. Ammonia-free air was plumbed into the instrument for these measurements.

Using the G1103-t to monitor the performance of a semicon NH3 filter. The ammonia concentration was stepped several times over a 30 day period (blue trace). The first breakthrough occurred after only 1/4 the total rated filter capacity.