AN035: Airborne Molecular Contamination Cleanroom Monitoring

AN035: Airborne Molecular Contamination Cleanroom Monitoring

Measurement and control of contaminants is critical in a variety of industrial applications including power generation, petrochemical processing, and semiconductor manufacturing. In many cases, the measurement of critical contaminants at parts per billion (ppb) levels is required to achieve optimal process control or safeguard valuable work-in-process material. 

Abstract: 

The production of integrated circuits (IC) is a lengthy, multi-step process that exposes the evolving wafer to a variety of chemicals and their associated contaminants. IC performance is severely affected by parts per million (ppm) contamination levels of electrically active impurities, and it is very difficult to guarantee a contaminant-free process due to the number of fabrication steps involved. Furnace operations expose the wafer to contamination present in ambient gases, while etching and cleaning cycles contribute to further contamination.

Picarro trace gas analyzers provide both the sensitivity and speed needed for the most demanding trace contaminant monitoring applications. Delivering continuous measurements with parts per trillion (ppt) sensitivity, Picarro analyzers are ideal for semiconductor manufacturing applications, including airborne molecular contamination (AMC) cleanroom monitoring, stack emissions, and fence-line monitoring. Use Picarro trace gas analyzers to maximize product yield with simple, low maintenance, low cost of ownership operation.